The doping of ceramic phases has been widely validated to enhance the wear resistance of HEA coatings or films. However, compared with the doped ceramic phases, in-situ precipitation may yield superior toughness, promising a synergistic
OverviewHighlightsKeywords1. Introduction2. Materials and experimental method3. Results and discussion4. ConclusionReferencesCited by (0)在sciencedirect上P. Henry, M.-J. Pac, C. Rousselot, M.-H. TuilierPublish Year: 2013
Aluminum nitride (AlN) is a ceramic material with excellent dielectric and thermal properties, and it is used in the microelectron and energy fields. Despite
On the other hand, aluminum nitride (AlN) material has become the first choice for carrying wafers due to its high strain-resistant mechanical properties, strong
On the other hand, aluminum nitride (AlN) material has become the first choice for carrying wafers due to its high strain-resistant mechanical properties, strong
Aluminum nitride (AlN) is a ceramic material with excellent dielectric and thermal properties, and it is used in the microelectron and energy fields. Despite polishing, the
The worn surface investigation confirmed the production of a stable tribo-oxide layer and revealed the enhanced wear resistance on the wealthy ceramic zone.
Aluminum Nitride (AlN) ceramics are used as wafer heating plates and wafer holding electrostatic chucks in semiconductor fabrication equipments. For tailoring
From the limited number of some ten nonmetallic inorganic solids known from the literature to have thermal conductivities greater than 100 W/m°K, aluminum nitride (AIN) is the